Radio frequency plasma pre-treatment for selective electroless Ag coating of three dimensional SU-8 microstructures

10.1117/12.908228

Saved in:
Bibliographic Details
Main Authors: Bettiol, A.A., Yan, Y., Teo, E.J., Tanoto, H., Teng, J.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98862
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
Description
Summary:10.1117/12.908228