Radio frequency plasma pre-treatment for selective electroless Ag coating of three dimensional SU-8 microstructures

10.1117/12.908228

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Bibliographic Details
Main Authors:	Bettiol, A.A., Yan, Y., Teo, E.J., Tanoto, H., Teng, J.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Direct laser writing Electroless plating Metamaterials
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98862
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-98862
record_format	dspace
spelling	sg-nus-scholar.10635-988622023-10-30T08:21:31Z Radio frequency plasma pre-treatment for selective electroless Ag coating of three dimensional SU-8 microstructures Bettiol, A.A. Yan, Y. Teo, E.J. Tanoto, H. Teng, J. PHYSICS Direct laser writing Electroless plating Metamaterials 10.1117/12.908228 Proceedings of SPIE - The International Society for Optical Engineering 8249 - PSISD 2014-10-16T09:52:21Z 2014-10-16T09:52:21Z 2012 Conference Paper Bettiol, A.A., Yan, Y., Teo, E.J., Tanoto, H., Teng, J. (2012). Radio frequency plasma pre-treatment for selective electroless Ag coating of three dimensional SU-8 microstructures. Proceedings of SPIE - The International Society for Optical Engineering 8249 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.908228 9780819488923 0277786X http://scholarbank.nus.edu.sg/handle/10635/98862 000302640700027 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Direct laser writing Electroless plating Metamaterials
spellingShingle	Direct laser writing Electroless plating Metamaterials Bettiol, A.A. Yan, Y. Teo, E.J. Tanoto, H. Teng, J. Radio frequency plasma pre-treatment for selective electroless Ag coating of three dimensional SU-8 microstructures
description	10.1117/12.908228
author2	PHYSICS
author_facet	PHYSICS Bettiol, A.A. Yan, Y. Teo, E.J. Tanoto, H. Teng, J.
format	Conference or Workshop Item
author	Bettiol, A.A. Yan, Y. Teo, E.J. Tanoto, H. Teng, J.
author_sort	Bettiol, A.A.
title	Radio frequency plasma pre-treatment for selective electroless Ag coating of three dimensional SU-8 microstructures
title_short	Radio frequency plasma pre-treatment for selective electroless Ag coating of three dimensional SU-8 microstructures
title_full	Radio frequency plasma pre-treatment for selective electroless Ag coating of three dimensional SU-8 microstructures
title_fullStr	Radio frequency plasma pre-treatment for selective electroless Ag coating of three dimensional SU-8 microstructures
title_full_unstemmed	Radio frequency plasma pre-treatment for selective electroless Ag coating of three dimensional SU-8 microstructures
title_sort	radio frequency plasma pre-treatment for selective electroless ag coating of three dimensional su-8 microstructures
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98862
_version_	1781786963786858496

Radio frequency plasma pre-treatment for selective electroless Ag coating of three dimensional SU-8 microstructures

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