Radio frequency plasma pre-treatment for selective electroless Ag coating of three dimensional SU-8 microstructures
10.1117/12.908228
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Main Authors: | Bettiol, A.A., Yan, Y., Teo, E.J., Tanoto, H., Teng, J. |
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Other Authors: | PHYSICS |
Format: | Conference or Workshop Item |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/98862 |
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Institution: | National University of Singapore |
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