Realization and simulation of high aspect ratio micro/nano structures by proton beam writing

Realization and simulation of high aspect ratio micro/nano structures by proton beam writing

10.1109/IMNC.2007.4456283

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Bibliographic Details
Main Authors: Chatzichristidi, M., Valamontes, E., Raptis, I., Van Kan, J.A., Watt, F.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98866
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Institution: National University of Singapore
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Summary:10.1109/IMNC.2007.4456283

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