Realization and simulation of high aspect ratio micro/nano structures by proton beam writing

10.1109/IMNC.2007.4456283

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Bibliographic Details
Main Authors:	Chatzichristidi, M., Valamontes, E., Raptis, I., Van Kan, J.A., Watt, F.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98866
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-98866
record_format	dspace
spelling	sg-nus-scholar.10635-988662015-02-04T02:28:04Z Realization and simulation of high aspect ratio micro/nano structures by proton beam writing Chatzichristidi, M. Valamontes, E. Raptis, I. Van Kan, J.A. Watt, F. PHYSICS 10.1109/IMNC.2007.4456283 Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC 420-421 2014-10-16T09:52:23Z 2014-10-16T09:52:23Z 2007 Conference Paper Chatzichristidi, M.,Valamontes, E.,Raptis, I.,Van Kan, J.A.,Watt, F. (2007). Realization and simulation of high aspect ratio micro/nano structures by proton beam writing. Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC : 420-421. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/IMNC.2007.4456283" target="_blank">https://doi.org/10.1109/IMNC.2007.4456283</a> 4990247248 http://scholarbank.nus.edu.sg/handle/10635/98866 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	10.1109/IMNC.2007.4456283
author2	PHYSICS
author_facet	PHYSICS Chatzichristidi, M. Valamontes, E. Raptis, I. Van Kan, J.A. Watt, F.
format	Conference or Workshop Item
author	Chatzichristidi, M. Valamontes, E. Raptis, I. Van Kan, J.A. Watt, F.
spellingShingle	Chatzichristidi, M. Valamontes, E. Raptis, I. Van Kan, J.A. Watt, F. Realization and simulation of high aspect ratio micro/nano structures by proton beam writing
author_sort	Chatzichristidi, M.
title	Realization and simulation of high aspect ratio micro/nano structures by proton beam writing
title_short	Realization and simulation of high aspect ratio micro/nano structures by proton beam writing
title_full	Realization and simulation of high aspect ratio micro/nano structures by proton beam writing
title_fullStr	Realization and simulation of high aspect ratio micro/nano structures by proton beam writing
title_full_unstemmed	Realization and simulation of high aspect ratio micro/nano structures by proton beam writing
title_sort	realization and simulation of high aspect ratio micro/nano structures by proton beam writing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98866
_version_	1681092102325272576

Realization and simulation of high aspect ratio micro/nano structures by proton beam writing

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