Resist evaluation for Ni mold fabrication and proton beam writing

Resist evaluation for Ni mold fabrication and proton beam writing

10.1016/j.mee.2012.05.003

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Bibliographic Details
Main Authors: Wang, Y.H., Malar, P., Zhao, J., Van Kan, J.A.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
AR-P 3250
Electroplating
ma-N 2410
PMMA
Proton beam writing (PBW)
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98868
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Institution: National University of Singapore
Description
Summary:10.1016/j.mee.2012.05.003

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