Resist evaluation for Ni mold fabrication and proton beam writing

10.1016/j.mee.2012.05.003

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Bibliographic Details
Main Authors:	Wang, Y.H., Malar, P., Zhao, J., Van Kan, J.A.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Subjects:	AR-P 3250 Electroplating ma-N 2410 PMMA Proton beam writing (PBW)
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98868
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-98868
record_format	dspace
spelling	sg-nus-scholar.10635-988682023-10-30T08:21:28Z Resist evaluation for Ni mold fabrication and proton beam writing Wang, Y.H. Malar, P. Zhao, J. Van Kan, J.A. PHYSICS AR-P 3250 Electroplating ma-N 2410 PMMA Proton beam writing (PBW) 10.1016/j.mee.2012.05.003 Microelectronic Engineering 102 40-43 MIENE 2014-10-16T09:52:24Z 2014-10-16T09:52:24Z 2013-02 Conference Paper Wang, Y.H., Malar, P., Zhao, J., Van Kan, J.A. (2013-02). Resist evaluation for Ni mold fabrication and proton beam writing. Microelectronic Engineering 102 : 40-43. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mee.2012.05.003 01679317 http://scholarbank.nus.edu.sg/handle/10635/98868 000312232300012 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	AR-P 3250 Electroplating ma-N 2410 PMMA Proton beam writing (PBW)
spellingShingle	AR-P 3250 Electroplating ma-N 2410 PMMA Proton beam writing (PBW) Wang, Y.H. Malar, P. Zhao, J. Van Kan, J.A. Resist evaluation for Ni mold fabrication and proton beam writing
description	10.1016/j.mee.2012.05.003
author2	PHYSICS
author_facet	PHYSICS Wang, Y.H. Malar, P. Zhao, J. Van Kan, J.A.
format	Conference or Workshop Item
author	Wang, Y.H. Malar, P. Zhao, J. Van Kan, J.A.
author_sort	Wang, Y.H.
title	Resist evaluation for Ni mold fabrication and proton beam writing
title_short	Resist evaluation for Ni mold fabrication and proton beam writing
title_full	Resist evaluation for Ni mold fabrication and proton beam writing
title_fullStr	Resist evaluation for Ni mold fabrication and proton beam writing
title_full_unstemmed	Resist evaluation for Ni mold fabrication and proton beam writing
title_sort	resist evaluation for ni mold fabrication and proton beam writing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98868
_version_	1781786965045149696

Resist evaluation for Ni mold fabrication and proton beam writing

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