Resist evaluation for Ni mold fabrication and proton beam writing

• Main Authors: Wang, Y.H., Malar, P., Zhao, J., Van Kan, J.A.
• Other Authors: PHYSICS
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: AR-P 3250; Electroplating; ma-N 2410; PMMA; Proton beam writing (PBW)
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/98868
• Institution: National University of Singapore

10.1016/j.mee.2012.05.003