The second generation Singapore high resolution proton beam writing facility

10.1063/1.3662205

Saved in:

Bibliographic Details
Main Authors:	Van Kan, J.A., Malar, P., Baysic De Vera, A.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98931
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-98931
record_format	dspace
spelling	sg-nus-scholar.10635-989312023-10-30T22:42:32Z The second generation Singapore high resolution proton beam writing facility Van Kan, J.A. Malar, P. Baysic De Vera, A. PHYSICS 10.1063/1.3662205 Review of Scientific Instruments 83 2 - RSINA 2014-10-16T09:53:11Z 2014-10-16T09:53:11Z 2012-02 Conference Paper Van Kan, J.A., Malar, P., Baysic De Vera, A. (2012-02). The second generation Singapore high resolution proton beam writing facility. Review of Scientific Instruments 83 (2) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.3662205 00346748 http://scholarbank.nus.edu.sg/handle/10635/98931 000301636100189 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.3662205
author2	PHYSICS
author_facet	PHYSICS Van Kan, J.A. Malar, P. Baysic De Vera, A.
format	Conference or Workshop Item
author	Van Kan, J.A. Malar, P. Baysic De Vera, A.
spellingShingle	Van Kan, J.A. Malar, P. Baysic De Vera, A. The second generation Singapore high resolution proton beam writing facility
author_sort	Van Kan, J.A.
title	The second generation Singapore high resolution proton beam writing facility
title_short	The second generation Singapore high resolution proton beam writing facility
title_full	The second generation Singapore high resolution proton beam writing facility
title_fullStr	The second generation Singapore high resolution proton beam writing facility
title_full_unstemmed	The second generation Singapore high resolution proton beam writing facility
title_sort	second generation singapore high resolution proton beam writing facility
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98931
_version_	1781786975843385344

The second generation Singapore high resolution proton beam writing facility

Similar Items