The second generation Singapore high resolution proton beam writing facility
10.1063/1.3662205
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Main Authors: | Van Kan, J.A., Malar, P., Baysic De Vera, A. |
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Other Authors: | PHYSICS |
Format: | Conference or Workshop Item |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/98931 |
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Institution: | National University of Singapore |
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