Fabrication of electrostatic MEMS microactuator based on X-ray lithography with Pb-based X-ray mask and dry-film-transfer-to-PCB process

• Main Authors: Kerdlapee,P., Wisitsoraat,A., Phokaratkul,D., Leksakul,K., Phatthanakun,R., Tuantranont,A.
• Format: Article
• Published: Springer Verlag 2015
• Subjects: Hardware and Architecture; Electrical and Electronic Engineering; Electronic, Optical and Magnetic Materials; Condensed Matter Physics
• Online Access: http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=84892601610&origin=inward; http://cmuir.cmu.ac.th/handle/6653943832/39027
• Institution: Chiang Mai University

Lithographie Galvanoformung Abformung (LIGA) is a promising approach for fabrication of high aspect ratio 3D microactuator for dual-stage slider in hard disk drive. However, this approach involves practically challenging X-ray lithography and structural transfer processes. In this work, electrostati...