Microwave remote plasma enhanced-atomic layer deposition system with multicusp confinement chamber
© 2014 AIP Publishing LLC. A microwave remote Plasma Enhanced-Atomic Layer Deposition system with multicusp confinement chamber is established at the Plasma and Beam Physics research facilities, Chiang Mai, Thailand. The system produces highly-reactive plasma species in order to enhance the depositi...
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th-cmuir.6653943832-449552018-01-24T06:01:59Z Microwave remote plasma enhanced-atomic layer deposition system with multicusp confinement chamber A. Dechana P. Thamboon D. Boonyawan © 2014 AIP Publishing LLC. A microwave remote Plasma Enhanced-Atomic Layer Deposition system with multicusp confinement chamber is established at the Plasma and Beam Physics research facilities, Chiang Mai, Thailand. The system produces highly-reactive plasma species in order to enhance the deposition process of thin films. The addition of the multicusp magnetic fields further improves the plasma density and uniformity in the reaction chamber. Thus, the system is more favorable to temperature-sensitive substrates when heating becomes unwanted. Furthermore, the remote-plasma feature, which is generated via microwave power source, offers tunability of the plasma properties separately from the process. As a result, the system provides high flexibility in choice of materials and design experiments, particularly for low-temperature applications. Performance evaluations of the system were carried on coating experiments of Al 2 O 3 layers onto a silicon wafer. The plasma characteristics in the chamber will be described. The resulted Al 2 O 3 films - analyzed by Rutherford Backscattering Spectrometry in channeling mode and by X-ray Photoelectron Spectroscopy techniques - will be discussed. 2018-01-24T06:01:59Z 2018-01-24T06:01:59Z 2014-10-01 Journal 10897623 00346748 2-s2.0-84908431286 10.1063/1.4898802 https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84908431286&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/44955 |
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© 2014 AIP Publishing LLC. A microwave remote Plasma Enhanced-Atomic Layer Deposition system with multicusp confinement chamber is established at the Plasma and Beam Physics research facilities, Chiang Mai, Thailand. The system produces highly-reactive plasma species in order to enhance the deposition process of thin films. The addition of the multicusp magnetic fields further improves the plasma density and uniformity in the reaction chamber. Thus, the system is more favorable to temperature-sensitive substrates when heating becomes unwanted. Furthermore, the remote-plasma feature, which is generated via microwave power source, offers tunability of the plasma properties separately from the process. As a result, the system provides high flexibility in choice of materials and design experiments, particularly for low-temperature applications. Performance evaluations of the system were carried on coating experiments of Al 2 O 3 layers onto a silicon wafer. The plasma characteristics in the chamber will be described. The resulted Al 2 O 3 films - analyzed by Rutherford Backscattering Spectrometry in channeling mode and by X-ray Photoelectron Spectroscopy techniques - will be discussed. |
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A. Dechana P. Thamboon D. Boonyawan |
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A. Dechana P. Thamboon D. Boonyawan Microwave remote plasma enhanced-atomic layer deposition system with multicusp confinement chamber |
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A. Dechana P. Thamboon D. Boonyawan |
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A. Dechana |
title |
Microwave remote plasma enhanced-atomic layer deposition system with multicusp confinement chamber |
title_short |
Microwave remote plasma enhanced-atomic layer deposition system with multicusp confinement chamber |
title_full |
Microwave remote plasma enhanced-atomic layer deposition system with multicusp confinement chamber |
title_fullStr |
Microwave remote plasma enhanced-atomic layer deposition system with multicusp confinement chamber |
title_full_unstemmed |
Microwave remote plasma enhanced-atomic layer deposition system with multicusp confinement chamber |
title_sort |
microwave remote plasma enhanced-atomic layer deposition system with multicusp confinement chamber |
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2018 |
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https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84908431286&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/44955 |
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