Microwave remote plasma enhanced-atomic layer deposition system with multicusp confinement chamber
© 2014 AIP Publishing LLC. A microwave remote Plasma Enhanced-Atomic Layer Deposition system with multicusp confinement chamber is established at the Plasma and Beam Physics research facilities, Chiang Mai, Thailand. The system produces highly-reactive plasma species in order to enhance the depositi...
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| Main Authors: | , , |
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| Format: | Journal |
| Published: |
2018
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| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84908431286&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/44955 |
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| Institution: | Chiang Mai University |