Microwave remote plasma enhanced-atomic layer deposition system with multicusp confinement chamber

• المؤلفون الرئيسيون: A. Dechana, P. Thamboon, D. Boonyawan
• التنسيق: دورية
• منشور في: 2018
• الوصول للمادة أونلاين: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84908431286&origin=inward; http://cmuir.cmu.ac.th/jspui/handle/6653943832/44955

© 2014 AIP Publishing LLC. A microwave remote Plasma Enhanced-Atomic Layer Deposition system with multicusp confinement chamber is established at the Plasma and Beam Physics research facilities, Chiang Mai, Thailand. The system produces highly-reactive plasma species in order to enhance the depositi...