Fabrication of 90° wall of {100} plane on (100) Si by NaOH solution via design of experiments

Fabrication of 90° wall of {100} plane on (100) Si by NaOH solution via design of experiments

The experimental trials were conducted by design of experiments (DOE) technique to find an anisotropic wet etching condition that achieves 90° wall angle on silicon (100) orientation wafer. Three considered factors assigned to the DOE were NaOH concentration, solution temperature, and stirring speed...

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書目詳細資料
Main Authors:	Chupong Pakpum, Nirut Pussadee
格式:	Book Series
出版:	2018
在線閱讀:	https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84898902835&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/45495
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!
機構:	Chiang Mai University

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