3D simulations on surface growth via chemical vapour deposition: Kinetic monte carlo investigation

• Main Authors: Thongon A., Choopun S., Yimnirun R., Laosiritaworn Y.
• 格式: Conference or Workshop Item
• 語言: English
• 出版: Taylor and Francis Inc. 2014
• 在線閱讀: http://www.scopus.com/inward/record.url?eid=2-s2.0-84901420608&partnerID=40&md5=e94179cc659c3fc382794f6251c3c1c1; http://cmuir.cmu.ac.th/handle/6653943832/4801
• 機構: Chiang Mai University

In this study, we used the kinetic Monte Carlo simulation to investigate the growth dynamic of the films on a substrate by imitating the chemical vapour deposition process. As a prototype, the system was confined into three-dimensional slap where the deposit chamber was divided into array grids. The...