3D simulations on surface growth via chemical vapour deposition: Kinetic monte carlo investigation

In this study, we used the kinetic Monte Carlo simulation to investigate the growth dynamic of the films on a substrate by imitating the chemical vapour deposition process. As a prototype, the system was confined into three-dimensional slap where the deposit chamber was divided into array grids. The...

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Bibliographic Details
Main Authors: Arjaree Thongon, Supab Choopun, Rattikorn Yimnirun, Yongyut Laosiritaworn
Format: Journal
Published: 2018
Subjects:
Online Access:https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84901420608&origin=inward
http://cmuir.cmu.ac.th/jspui/handle/6653943832/53492
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Institution: Chiang Mai University