3D simulations on surface growth via chemical vapour deposition: Kinetic monte carlo investigation
In this study, we used the kinetic Monte Carlo simulation to investigate the growth dynamic of the films on a substrate by imitating the chemical vapour deposition process. As a prototype, the system was confined into three-dimensional slap where the deposit chamber was divided into array grids. The...
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| Main Authors: | , , , |
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| 格式: | 雜誌 |
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2018
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| 在線閱讀: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84901420608&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/53492 |
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