3D simulations on surface growth via chemical vapour deposition: Kinetic monte carlo investigation
In this study, we used the kinetic Monte Carlo simulation to investigate the growth dynamic of the films on a substrate by imitating the chemical vapour deposition process. As a prototype, the system was confined into three-dimensional slap where the deposit chamber was divided into array grids. The...
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| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
Taylor and Francis Inc.
2014
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| Online Access: | http://www.scopus.com/inward/record.url?eid=2-s2.0-84901420608&partnerID=40&md5=e94179cc659c3fc382794f6251c3c1c1 http://cmuir.cmu.ac.th/handle/6653943832/4801 |
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| Institution: | Chiang Mai University |
| Language: | English |
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