A new design and computer simulation of a 5-electrode ion extraction/focusing system
A 13.56 MHz radio-frequency (rf) driven multicusp ion source has been constructed[1] to produce a high argon ion current density. Milliampere-range argon ion current can be extracted from the source. An in-waveguide microwave plasma source has been utilized as the ion beam neutralizer[2]. The neutra...
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| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2014
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| Online Access: | http://www.scopus.com/inward/record.url?eid=2-s2.0-24944497808&partnerID=40&md5=2800d50011d62d57ccee69cb25dcdbb1 http://cmuir.cmu.ac.th/handle/6653943832/4943 |
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| Institution: | Chiang Mai University |
| Language: | English |