Effect of aluminum and indium co-doping on zinc oxide films prepared by dc magnetron sputtering
Aluminum and indium co-doped zinc oxide (AIZO) thin films were prepared by direct current (dc) magnetron sputtering on glass substrate in pure argon atmosphere. Three inches of zinc oxide ceramic with 0.5 wt.% of aluminum and indium doping was used as a target in static mode. The influence of sputte...
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| Main Authors: | , , , |
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| Format: | Journal |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=80755175357&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/50060 |
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| Institution: | Chiang Mai University |