Ion-beam synthesis and photoluminescence of SiC nanocrystals assisted by MeV-heavy-ion-beam annealing

This work explored a novel way to synthesize silicon carbide (SiC) nanocrystals for photoluminescence. Carbon ions at 90 keV were implanted in single crystalline silicon wafers at elevated temperature, followed by irradiation using xenon ion beams at an energy of 4 MeV with two low fluences of 5 × 1...

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Bibliographic Details
Main Authors: J. Khamsuwan, S. Intarasiri, K. Kirkby, P. K. Chu, S. Singkarat, L. D. Yu
Format: Journal
Published: 2018
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Online Access:https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84861610646&origin=inward
http://cmuir.cmu.ac.th/jspui/handle/6653943832/51989
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Institution: Chiang Mai University
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