Patterning of burnishing head for hard disk platters by synchrotron radiation lithography
© Springer-Verlag Berlin Heidelberg 2014. This paper discusses the patterning of the burnishing head for hard disk platters on the AlTiC substrate, performed by X-ray exposure through X-ray mask to identify areas still left on the substrate after the photoresist development. The high energy and the...
Saved in:
| Main Authors: | , , |
|---|---|
| Format: | Journal |
| Published: |
2018
|
| Subjects: | |
| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85027935856&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/53374 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Chiang Mai University |