Advantage of dual-confined plasmas over conventional and facing-target plasmas for improving transparent-conductive properties in Al doped ZnO thin films

• Main Authors: Long Wen, Manish Kumar, B. B. Sahu, S. B. Jin, C. Sawangrat, K. Leksakul, J. G. Han
• 格式: 雜誌
• 出版: 2018
• 主題: Chemistry; Materials Science; Physics and Astronomy
• 在線閱讀: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84937906654&origin=inward; http://cmuir.cmu.ac.th/jspui/handle/6653943832/54270
• 機構: Chiang Mai University

© 2015 Elsevier B.V. Al doped ZnO films are prepared in dual-confined plasmas (rectangular side-ways and one top-side) in DC magnetron sputtering system without intentional substrate-heating. Present confinement shows improved transparent-conductive properties in Al doped ZnO thin films, when compar...