SiC<inf>x</inf>H<inf>y</inf>-based hydrophobic thin films with good chemical and mechanical properties synthesized by PECVD at various substrate temperatures
© 2015 Elsevier B.V. This work investigates on chemical and mechanical resistance of hydrophobic films; prepared using radio frequency (RF) plasma enhanced chemical vapor deposition (PECVD) method, by varying substrate temperature. For this work, Hexamethyldisilane (HMDS) is used as the precursor, w...
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| Main Authors: | , , , , , |
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| Format: | Journal |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84942981864&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/54596 |
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| Institution: | Chiang Mai University |