SiC<inf>x</inf>H<inf>y</inf>-based hydrophobic thin films with good chemical and mechanical properties synthesized by PECVD at various substrate temperatures

• Main Authors: Jun S. Lee, Su B. Jin, N. Vichiansan, Jeon G. Han, M. Hori, K. Leksakul
• Format: Journal
• Published: 2018
• Subjects: Materials Science; Physics and Astronomy
• Online Access: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84942981864&origin=inward; http://cmuir.cmu.ac.th/jspui/handle/6653943832/54596
• Institution: Chiang Mai University

© 2015 Elsevier B.V. This work investigates on chemical and mechanical resistance of hydrophobic films; prepared using radio frequency (RF) plasma enhanced chemical vapor deposition (PECVD) method, by varying substrate temperature. For this work, Hexamethyldisilane (HMDS) is used as the precursor, w...