A self-DLC coated cathode plasma source

A self-DLC coated cathode plasma source

A novel self-microwave plasma source modified by diamond-like carbon (DLC) coating self-cathode for density enhancement was devised. This simple method had been once routed for enhanced efficient microwave plasma with very low-cost. The coating parameters in fabrication of the self-coated DLC cathod...

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書目詳細資料
Main Authors:	A. Deachana, D. Boonyawan, B. Yodsombat
格式:	雜誌
出版:	2018
主題:	Chemistry Materials Science Physics and Astronomy
在線閱讀:	https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=67349127573&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/59475
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