The electrical and mechanical properties of Au-V and Au- V2 O5 thin films for wear-resistant RF MEMS switches
To explore alternatives to the use of pure Au in Ohmic contact RF microelectromechanical switches, we have measured changes in the electrical resistivity and nanoindentation hardness of a series of sputter deposited Au-V and Au- V2 O5 thin films. Increasing V content in the Au-V alloys increases res...
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| Main Authors: | , , , |
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| Format: | Journal |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=43049134835&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/60737 |
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| Institution: | Chiang Mai University |