The electrical and mechanical properties of Au-V and Au- V2 O5 thin films for wear-resistant RF MEMS switches

• Main Authors: Thirumalesh Bannuru, Walter L. Brown, Suparut Narksitipan, Richard P. Vinci
• Format: Journal
• Published: 2018
• Subjects: Physics and Astronomy
• Online Access: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=43049134835&origin=inward; http://cmuir.cmu.ac.th/jspui/handle/6653943832/60737
• Institution: Chiang Mai University

To explore alternatives to the use of pure Au in Ohmic contact RF microelectromechanical switches, we have measured changes in the electrical resistivity and nanoindentation hardness of a series of sputter deposited Au-V and Au- V2 O5 thin films. Increasing V content in the Au-V alloys increases res...