Effects of step-deposition on structures and properties of transparent conducting aluminum-doped zinc oxide films prepared by DC magnetron sputtering

• المؤلفون الرئيسيون: T. Tohsophon, N. Sirikulrat
• التنسيق: دورية
• منشور في: 2018
• الموضوعات: Energy; Materials Science
• الوصول للمادة أونلاين: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=33748295592&origin=inward; http://cmuir.cmu.ac.th/jspui/handle/6653943832/61644

The 2 wt% aluminum-doped zinc oxide films (AZO) was sputtered on corning glass plate at temperatures of 30-200 °C by DC magnetron sputtering using ceramic target. The microstructures and electrical resistivity of thin films were investigated by scanning electron microscope (SEM) and the van der Pauw...