Damp heat stability and annealing behavior of aluminum doped zinc oxide films prepared by magnetron sputtering
The damp heat stability and subsequent vacuum annealing behavior of aluminum doped zinc oxide (AZO) films was investigated using Hall effect measurements, X-ray diffraction (XRD) and optical spectrometry techniques. The AZO films were deposited on glass or silicon wafers using reactive and non-react...
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| Main Authors: | , , , , , , |
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| 格式: | 雜誌 |
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2018
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| 在線閱讀: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=33646538800&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/61741 |
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