Effects of rf Power on Chemical and Physical Structure of Polytetrafluoroethylene Thin Films
Polytetrafluoroethylene (PTFE) thin films were prepared by rf magnetron sputtering in argon plasma. The effects of rf power (10 to 100 W) on the chemical and physical structures of PTFE thin films were studied. X-ray photoelectron spectroscopy (XPS) results showed that small amounts of CF3 (1.75%) w...
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| Main Authors: | , , , |
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| 格式: | บทความวารสาร |
| 語言: | English |
| 出版: |
Science Faculty of Chiang Mai University
2019
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| 在線閱讀: | http://it.science.cmu.ac.th/ejournal/dl.php?journal_id=8038 http://cmuir.cmu.ac.th/jspui/handle/6653943832/63894 |
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| 機構: | Chiang Mai University |
| 語言: | English |