Plasma polymerization of hexamethyldisiloxane: Investigation of the effect of carrier gas related to the film properties

In this work we present the influence of carrier gases in the deposition of low-pressure discharge plasma of hexamethyldisiloxane (HMDSO). Plasma polymerized HMDSO films were deposited with an inductively-coupled discharge reactor using Ar and O2 as carrier gases. The films deposited in Ar contained...

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Main Authors: Chaiwong C., Rachtanapun P., Sarapirom S., Boonyawan D.
Format: Article
Language:English
Published: 2014
Online Access:http://www.scopus.com/inward/record.url?eid=2-s2.0-84880571045&partnerID=40&md5=29fe21058a8d88caef1a5d9b3c916c10
http://cmuir.cmu.ac.th/handle/6653943832/665
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Institution: Chiang Mai University
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spelling th-cmuir.6653943832-6652014-08-29T08:50:33Z Plasma polymerization of hexamethyldisiloxane: Investigation of the effect of carrier gas related to the film properties Chaiwong C. Rachtanapun P. Sarapirom S. Boonyawan D. In this work we present the influence of carrier gases in the deposition of low-pressure discharge plasma of hexamethyldisiloxane (HMDSO). Plasma polymerized HMDSO films were deposited with an inductively-coupled discharge reactor using Ar and O2 as carrier gases. The films deposited in Ar contained polymeric structure in the form of SiOxCyHz and could significantly improve the barrier to water vapor of poly(lactic acid) (PLA). The SiOx-like structure of HMDSO films was obtained when using O2 as the carrier gas. However, the films supported some state of residual stress leading to film failures and a significant loss of barrier performance of PLA. The formation of organic and inorganic contents in the films was confirmed by X-ray photoelectron spectroscopy (XPS). The discharge power had an effect on the topography of the films. Rough surface with coarse texture was obtained when the process was done in Ar at high discharge powers. On the other hand, the deposition process in O2 induced smoother surface of plasma-polymerized films. © 2012 Elsevier B.V. 2014-08-29T08:50:33Z 2014-08-29T08:50:33Z 2013 Article 02578972 10.1016/j.surfcoat.2012.08.058 http://www.scopus.com/inward/record.url?eid=2-s2.0-84880571045&partnerID=40&md5=29fe21058a8d88caef1a5d9b3c916c10 http://cmuir.cmu.ac.th/handle/6653943832/665 English
institution Chiang Mai University
building Chiang Mai University Library
country Thailand
collection CMU Intellectual Repository
language English
description In this work we present the influence of carrier gases in the deposition of low-pressure discharge plasma of hexamethyldisiloxane (HMDSO). Plasma polymerized HMDSO films were deposited with an inductively-coupled discharge reactor using Ar and O2 as carrier gases. The films deposited in Ar contained polymeric structure in the form of SiOxCyHz and could significantly improve the barrier to water vapor of poly(lactic acid) (PLA). The SiOx-like structure of HMDSO films was obtained when using O2 as the carrier gas. However, the films supported some state of residual stress leading to film failures and a significant loss of barrier performance of PLA. The formation of organic and inorganic contents in the films was confirmed by X-ray photoelectron spectroscopy (XPS). The discharge power had an effect on the topography of the films. Rough surface with coarse texture was obtained when the process was done in Ar at high discharge powers. On the other hand, the deposition process in O2 induced smoother surface of plasma-polymerized films. © 2012 Elsevier B.V.
format Article
author Chaiwong C.
Rachtanapun P.
Sarapirom S.
Boonyawan D.
spellingShingle Chaiwong C.
Rachtanapun P.
Sarapirom S.
Boonyawan D.
Plasma polymerization of hexamethyldisiloxane: Investigation of the effect of carrier gas related to the film properties
author_facet Chaiwong C.
Rachtanapun P.
Sarapirom S.
Boonyawan D.
author_sort Chaiwong C.
title Plasma polymerization of hexamethyldisiloxane: Investigation of the effect of carrier gas related to the film properties
title_short Plasma polymerization of hexamethyldisiloxane: Investigation of the effect of carrier gas related to the film properties
title_full Plasma polymerization of hexamethyldisiloxane: Investigation of the effect of carrier gas related to the film properties
title_fullStr Plasma polymerization of hexamethyldisiloxane: Investigation of the effect of carrier gas related to the film properties
title_full_unstemmed Plasma polymerization of hexamethyldisiloxane: Investigation of the effect of carrier gas related to the film properties
title_sort plasma polymerization of hexamethyldisiloxane: investigation of the effect of carrier gas related to the film properties
publishDate 2014
url http://www.scopus.com/inward/record.url?eid=2-s2.0-84880571045&partnerID=40&md5=29fe21058a8d88caef1a5d9b3c916c10
http://cmuir.cmu.ac.th/handle/6653943832/665
_version_ 1681419525774376960