Plasma polymerization of hexamethyldisiloxane: Investigation of the effect of carrier gas related to the film properties
In this work we present the influence of carrier gases in the deposition of low-pressure discharge plasma of hexamethyldisiloxane (HMDSO). Plasma polymerized HMDSO films were deposited with an inductively-coupled discharge reactor using Ar and O2 as carrier gases. The films deposited in Ar contained...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2014
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| Online Access: | http://www.scopus.com/inward/record.url?eid=2-s2.0-84880571045&partnerID=40&md5=29fe21058a8d88caef1a5d9b3c916c10 http://cmuir.cmu.ac.th/handle/6653943832/665 |
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| Institution: | Chiang Mai University |
| Language: | English |