Experimental and simulation study of the Schottky barrier lowering by substrate doping variation for PtSi source/drain SBFETs

by Lousberg, G.P., Yu, H.Y., Froment, B., Li, M.F., Augendre, E., De Keersgieter, A., Demeurisse, C., Brus, S., Degroote, B., Hoffmann, T., Lauwers, A., DePotter, M., Kubicek, S., Anil, K., Absil, P., Jurczak, M., Biesemans, S.
Published 2014