DESIGN AND IMPLEMENTATION OF OPTICAL COMPONENTS AND 3D STRUCTURE OF THIN FILM THICKNESS MEASUREMENT SYSTEM USING ROTATING ANALYZER ELLIPSOMETRY METHOD
Thin film plays an important role in many kind of industries, one of them is the semiconductor industry such as microelectronics, photovoltaics, and optoelectronics. In the process of manufacturing and fabrication of semiconductor ICs, most of the steps uses the litography process. Any drop in the q...
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| Format: | Final Project |
| Language: | Indonesia |
| Online Access: | https://digilib.itb.ac.id/gdl/view/36402 |
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| Institution: | Institut Teknologi Bandung |
| Language: | Indonesia |