DESIGN AND IMPLEMENTATION OF DIGITAL SIGNAL PROCESSING SYSTEM USING ESP32 FOR THIN FILM THICKNESS MEASUREMENT SYSTEM USING ROTATING ANALYZER ELLIPSOMETRY METHOD
The loss of production failure in the semiconductor industry caused by inaccuracy of the thickness of the photoresist layer above the wafer surface is the reason for making this thin film measurement system. This system uses the Rotating-Analyzer Ellipsometry (RAE) algorithm. Microcontroller ESP...
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| Format: | Final Project |
| Language: | Indonesia |
| Online Access: | https://digilib.itb.ac.id/gdl/view/38357 |
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| Institution: | Institut Teknologi Bandung |
| Language: | Indonesia |