DESIGN AND IMPLEMENTATION OF INSTRUMENTATION SYSTEMS ON ROTATING ANALYZER ELLIPSOMETER
In the semiconductor industry, the thickness of the photoresist layer when the photolithograph process plays an important role in determining a failure in IC manufacturing. The thickness of this layer is important because, at the stage of addition of doping ions, a photoresist that is too thin will...
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| Format: | Final Project |
| Language: | Indonesia |
| Online Access: | https://digilib.itb.ac.id/gdl/view/37032 |
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| Institution: | Institut Teknologi Bandung |
| Language: | Indonesia |