DESIGN AND IMPLEMENTATION OF STRUCTURAL PARTS IN THE AUTOMATIC WAFER CLEANING SYSTEM
In the research of the semiconductor field, the process of preparing samples from semiconductor wafers has a failure rate quite high. The two main causes are photolithographic errors and errors in wafer cleaning processes. Wafer cleaning is an important part of the research process of objects using...
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| Format: | Final Project |
| Language: | Indonesia |
| Online Access: | https://digilib.itb.ac.id/gdl/view/41756 |
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| Institution: | Institut Teknologi Bandung |
| Language: | Indonesia |