STUDI STRUKTUR KRISTAL FILM TIPIS PbZr0,625Ti0,375O3 YANG DITUMBUHKAN DENGAN METODA DC UNBALANCED MAGNETRON SPUTTERING.
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Main Author: | Ayu Ketut Umiati, Ngurah |
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Format: | Theses |
Language: | Indonesia |
Online Access: | https://digilib.itb.ac.id/gdl/view/527 |
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Institution: | Institut Teknologi Bandung |
Language: | Indonesia |
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