Investigation of surface roughness on platinum deposited wafer after reactive ion etching using SF₆+Argon gaseous

Investigation of surface roughness on platinum deposited wafer after reactive ion etching using SF₆+Argon gaseous

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Bibliographic Details
Main Authors: Zaliman, Sauli, Dr., Retnasamy, Vithyacharan, Aaron, Koay Terr Yeow, Siew Chui, Goh, Khairul Anwar, Mohamad Khazali, Nooraihan, Abdullah
Other Authors: zaliman@unimap.edu.my
Format: Article
Language:English
Published: Trans Tech Publications 2014
Subjects:
DOE
Platinum
Reactive Ion Etching (RIE)
SF₆+Argon
Surface roughness
Online Access:http://dspace.unimap.edu.my:80/dspace/handle/123456789/33656
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Institution: Universiti Malaysia Perlis
Language: English

Internet

http://dspace.unimap.edu.my:80/dspace/handle/123456789/33656

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