A ZnO microcantilever for high-frequency nanopositioning : modeling, fabrication and characterization

• المؤلفون الرئيسيون: Yuan, Yanhui, Du, Hejun, Wang, Peihong, Chow, Kun Shyong, Zhang, Mingsheng, Yu, Shengkai, Liu, Bo
• مؤلفون آخرون: School of Mechanical and Aerospace Engineering
• التنسيق: مقال
• اللغة: English
• منشور في: 2013
• الموضوعات: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/101399; http://hdl.handle.net/10220/18362
• المؤسسة: Nanyang Technological University

Previous studies on zinc oxide (ZnO) microcantilevers have been focused on applications in the atomic force microscopy (AFM). Characteristics of ZnO microcantilever actuators were not thoroughly investigated in those studies. This paper reports modeling, fabrication and characterization of a piezoel...