A ZnO microcantilever for high-frequency nanopositioning : modeling, fabrication and characterization

• Main Authors: Yuan, Yanhui, Du, Hejun, Wang, Peihong, Chow, Kun Shyong, Zhang, Mingsheng, Yu, Shengkai, Liu, Bo
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: https://hdl.handle.net/10356/101399; http://hdl.handle.net/10220/18362
• Institution: Nanyang Technological University

Previous studies on zinc oxide (ZnO) microcantilevers have been focused on applications in the atomic force microscopy (AFM). Characteristics of ZnO microcantilever actuators were not thoroughly investigated in those studies. This paper reports modeling, fabrication and characterization of a piezoel...