A ZnO microcantilever for high-frequency nanopositioning : modeling, fabrication and characterization

• Main Authors: Yuan, Yanhui, Du, Hejun, Wang, Peihong, Chow, Kun Shyong, Zhang, Mingsheng, Yu, Shengkai, Liu, Bo
• 其他作者: School of Mechanical and Aerospace Engineering
• 格式: Article
• 語言: English
• 出版: 2013
• 主題: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• 在線閱讀: https://hdl.handle.net/10356/101399; http://hdl.handle.net/10220/18362
• 機構: Nanyang Technological University

Previous studies on zinc oxide (ZnO) microcantilevers have been focused on applications in the atomic force microscopy (AFM). Characteristics of ZnO microcantilever actuators were not thoroughly investigated in those studies. This paper reports modeling, fabrication and characterization of a piezoel...