Annealing effect on the optical properties of implanted silicon in a silicon nitride matrix
Optical properties of implanted Si in a silicon nitride thin film have been determined with spectroscopic ellipsometry based on the Tauc–Lorentz (TL) model and the Bruggeman effective medium approximation. It is shown that the suppressed dielectric functions of the implanted Si are dominated by the...
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| اللغة: | English |
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2010
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| الوصول للمادة أونلاين: | https://hdl.handle.net/10356/101981 http://hdl.handle.net/10220/6400 |
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sg-ntu-dr.10356-1019812020-03-07T14:00:35Z Annealing effect on the optical properties of implanted silicon in a silicon nitride matrix Fung, Stevenson Hon Yuen Liu, Yang Yang, Ming Wong, Jen It Liu, Yu Chan Liu, Zhen Cen, Zhan Hong Chen, Tupei Ding, Liang School of Electrical and Electronic Engineering A*STAR SIMTech DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics Optical properties of implanted Si in a silicon nitride thin film have been determined with spectroscopic ellipsometry based on the Tauc–Lorentz (TL) model and the Bruggeman effective medium approximation. It is shown that the suppressed dielectric functions of the implanted Si are dominated by the energy transitions related to the critical point E2. The effect of thermal annealing on the dielectric functions of the implanted Si has been investigated. The analysis of the dielectric functions based on the evolution of the TL parameters can provide an insight into the structural changes in the implanted Si embedded in the Si3N4 matrix caused by the annealing. Published version 2010-09-03T08:40:39Z 2019-12-06T20:47:53Z 2010-09-03T08:40:39Z 2019-12-06T20:47:53Z 2008 2008 Journal Article Cen, Z. H., Chen, T., Ding, L., Liu, Y., Yang, M., Wong, J. I., et al. (2008). Annealing effect on the optical properties of implanted silicon in a silicon nitride matrix. Applied Physics Letters, 93, 1-3. 0003-6951 https://hdl.handle.net/10356/101981 http://hdl.handle.net/10220/6400 10.1063/1.2962989 en Applied physics letters Applied Physics Letters © copyright 2008 American Institute of Physics. The journal's website is located at http://apl.aip.org/applab/v93/i2/p023122_s1?isAuthorized=no 3 p. application/pdf |
| institution |
Nanyang Technological University |
| building |
NTU Library |
| country |
Singapore |
| collection |
DR-NTU |
| language |
English |
| topic |
DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics |
| spellingShingle |
DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics Fung, Stevenson Hon Yuen Liu, Yang Yang, Ming Wong, Jen It Liu, Yu Chan Liu, Zhen Cen, Zhan Hong Chen, Tupei Ding, Liang Annealing effect on the optical properties of implanted silicon in a silicon nitride matrix |
| description |
Optical properties of implanted Si in a silicon nitride thin film have been determined with spectroscopic ellipsometry based on the Tauc–Lorentz (TL) model and the Bruggeman effective medium approximation. It is shown that the suppressed dielectric functions of the implanted Si are dominated by the energy transitions related to the critical point E2. The effect of thermal annealing on the dielectric functions of the implanted Si has been investigated. The analysis of the dielectric functions based on the evolution of the TL parameters can provide an insight into the structural changes in the implanted Si embedded in the Si3N4 matrix caused by the annealing. |
| author2 |
School of Electrical and Electronic Engineering |
| author_facet |
School of Electrical and Electronic Engineering Fung, Stevenson Hon Yuen Liu, Yang Yang, Ming Wong, Jen It Liu, Yu Chan Liu, Zhen Cen, Zhan Hong Chen, Tupei Ding, Liang |
| format |
Article |
| author |
Fung, Stevenson Hon Yuen Liu, Yang Yang, Ming Wong, Jen It Liu, Yu Chan Liu, Zhen Cen, Zhan Hong Chen, Tupei Ding, Liang |
| author_sort |
Fung, Stevenson Hon Yuen |
| title |
Annealing effect on the optical properties of implanted silicon in a silicon nitride matrix |
| title_short |
Annealing effect on the optical properties of implanted silicon in a silicon nitride matrix |
| title_full |
Annealing effect on the optical properties of implanted silicon in a silicon nitride matrix |
| title_fullStr |
Annealing effect on the optical properties of implanted silicon in a silicon nitride matrix |
| title_full_unstemmed |
Annealing effect on the optical properties of implanted silicon in a silicon nitride matrix |
| title_sort |
annealing effect on the optical properties of implanted silicon in a silicon nitride matrix |
| publishDate |
2010 |
| url |
https://hdl.handle.net/10356/101981 http://hdl.handle.net/10220/6400 |
| _version_ |
1681043055461793792 |