Annealing effect on the optical properties of implanted silicon in a silicon nitride matrix

• المؤلفون الرئيسيون: Fung, Stevenson Hon Yuen, Liu, Yang, Yang, Ming, Wong, Jen It, Liu, Yu Chan, Liu, Zhen, Cen, Zhan Hong, Chen, Tupei, Ding, Liang
• مؤلفون آخرون: School of Electrical and Electronic Engineering
• التنسيق: مقال
• اللغة: English
• منشور في: 2010
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/101981; http://hdl.handle.net/10220/6400
• المؤسسة: Nanyang Technological University

Optical properties of implanted Si in a silicon nitride thin film have been determined with spectroscopic ellipsometry based on the Tauc–Lorentz (TL) model and the Bruggeman effective medium approximation. It is shown that the suppressed dielectric functions of the implanted Si are dominated by the...