Annealing effect on the optical properties of implanted silicon in a silicon nitride matrix

• Main Authors: Fung, Stevenson Hon Yuen, Liu, Yang, Yang, Ming, Wong, Jen It, Liu, Yu Chan, Liu, Zhen, Cen, Zhan Hong, Chen, Tupei, Ding, Liang
• 其他作者: School of Electrical and Electronic Engineering
• 格式: Article
• 語言: English
• 出版: 2010
• 主題: DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
• 在線閱讀: https://hdl.handle.net/10356/101981; http://hdl.handle.net/10220/6400

Optical properties of implanted Si in a silicon nitride thin film have been determined with spectroscopic ellipsometry based on the Tauc–Lorentz (TL) model and the Bruggeman effective medium approximation. It is shown that the suppressed dielectric functions of the implanted Si are dominated by the...