Robust electromigration reliability through engineering optimization

With complex process integration approach and severe fabrication limitations caused by introduction of new materials and diminishing process margins, there are mounting concerns with the increased failure rate at the early life cycle (e.g.<1 year operation) of product application known as infant...

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Main Authors: Tee, Kheng Chok, Ee, Yong Chiang, Aubel, Oliver, Pey, Kin Leong, Ng, Wee Loon, Liu, Junfeng, Tan, Chuan Seng
Other Authors: School of Electrical and Electronic Engineering
Format: Article
Language:English
Published: 2014
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Online Access:https://hdl.handle.net/10356/103452
http://hdl.handle.net/10220/24506
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-1034522020-03-07T14:00:36Z Robust electromigration reliability through engineering optimization Tee, Kheng Chok Ee, Yong Chiang Aubel, Oliver Pey, Kin Leong Ng, Wee Loon Liu, Junfeng Tan, Chuan Seng School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Microelectronics With complex process integration approach and severe fabrication limitations caused by introduction of new materials and diminishing process margins, there are mounting concerns with the increased failure rate at the early life cycle (e.g.<1 year operation) of product application known as infant mortality failures. A paradigm change in reliability qualification methodology aim at understanding the impact of variation on reliability is required to ensure reliability robustness. Using Electromigration (EM) as an example, this paper described a methodology where the impact of process variation on reliability is studied. A model that predicts the impact of process variation on EM sigma is also proposed which enables variation and its impact on reliability to be quantified. Using this methodology, the critical process parameters impacting reliability could be identified and controlled to ensure reliability robustness. Accepted version 2014-12-22T02:39:42Z 2019-12-06T21:12:59Z 2014-12-22T02:39:42Z 2019-12-06T21:12:59Z 2014 2014 Journal Article Ng, W. L., Tee, K. C., Liu, J., Ee, Y. C., Aubel, O., Tan, C. S., et al. (2014). Robust electromigration reliability through engineering optimization. Microelectronics reliability, 54(9-10), 1666-1670. 0026-2714 https://hdl.handle.net/10356/103452 http://hdl.handle.net/10220/24506 10.1016/j.microrel.2014.07.096 en Microelectronics reliability © 2014 Elsevier Ltd. This is the author created version of a work that has been peer reviewed and accepted for publication by Microelectronics Reliability, Elsevier Ltd. It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: [Article DOI: http://dx.doi.org/10.1016/j.microrel.2014.07.096]. 3 p. application/pdf
institution Nanyang Technological University
building NTU Library
country Singapore
collection DR-NTU
language English
topic DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Tee, Kheng Chok
Ee, Yong Chiang
Aubel, Oliver
Pey, Kin Leong
Ng, Wee Loon
Liu, Junfeng
Tan, Chuan Seng
Robust electromigration reliability through engineering optimization
description With complex process integration approach and severe fabrication limitations caused by introduction of new materials and diminishing process margins, there are mounting concerns with the increased failure rate at the early life cycle (e.g.<1 year operation) of product application known as infant mortality failures. A paradigm change in reliability qualification methodology aim at understanding the impact of variation on reliability is required to ensure reliability robustness. Using Electromigration (EM) as an example, this paper described a methodology where the impact of process variation on reliability is studied. A model that predicts the impact of process variation on EM sigma is also proposed which enables variation and its impact on reliability to be quantified. Using this methodology, the critical process parameters impacting reliability could be identified and controlled to ensure reliability robustness.
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Tee, Kheng Chok
Ee, Yong Chiang
Aubel, Oliver
Pey, Kin Leong
Ng, Wee Loon
Liu, Junfeng
Tan, Chuan Seng
format Article
author Tee, Kheng Chok
Ee, Yong Chiang
Aubel, Oliver
Pey, Kin Leong
Ng, Wee Loon
Liu, Junfeng
Tan, Chuan Seng
author_sort Tee, Kheng Chok
title Robust electromigration reliability through engineering optimization
title_short Robust electromigration reliability through engineering optimization
title_full Robust electromigration reliability through engineering optimization
title_fullStr Robust electromigration reliability through engineering optimization
title_full_unstemmed Robust electromigration reliability through engineering optimization
title_sort robust electromigration reliability through engineering optimization
publishDate 2014
url https://hdl.handle.net/10356/103452
http://hdl.handle.net/10220/24506
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