Electrical performance and stability of tungsten indium zinc oxide thin-film transistors

• Main Authors: Chauhan, Ram Narayan, Tiwari, Nidhi, Shieh, Han-Ping D., Liu, Po-Tsun
• Other Authors: Energy Research Institute @NTU
• Format: Article
• Language: English
• Published: 2019
• Subjects: Semiconductor; DRNTU::Science::Physics; Sputtering
• Online Access: https://hdl.handle.net/10356/105563; http://hdl.handle.net/10220/48711
• Institution: Nanyang Technological University

Amorphous tungsten indium zinc oxide thin film transistors (WIZO TFTs) have been prepared using radio-frequency (RF) magnetron co-sputtering system to co-sputter indium zinc oxide (IZO) and indium tungsten oxide (IWO) targets. The electrical performance parameters and positive biased stress (PBS) te...