Micromachined high-g accelerometers : a review

This Topical Review reviews research and commercial development of high-g micromachined accelerometers. Emphasis is placed on different high-g sensing schemes and popular design templates used to achieve high-g sensing. Additionally, trends in high-g micromachined accelerometer development both in r...

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Main Authors:	Narasimhan, Vinayak, Li, Holden, Miao, Jianmin
Other Authors:	School of Mechanical and Aerospace Engineering
Format:	Article
Language:	English
Published:	2015
Subjects:	DRNTU::Engineering::Mechanical engineering::Mechatronics
Online Access:	https://hdl.handle.net/10356/107207 http://hdl.handle.net/10220/25338
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Institution:	Nanyang Technological University
Language:	English

id	sg-ntu-dr.10356-107207
record_format	dspace
spelling	sg-ntu-dr.10356-1072072023-03-04T17:17:42Z Micromachined high-g accelerometers : a review Narasimhan, Vinayak Li, Holden Miao, Jianmin School of Mechanical and Aerospace Engineering DRNTU::Engineering::Mechanical engineering::Mechatronics This Topical Review reviews research and commercial development of high-g micromachined accelerometers. Emphasis is placed on different high-g sensing schemes and popular design templates used to achieve high-g sensing. Additionally, trends in high-g micromachined accelerometer development both in research and in the market are discussed. Accepted version 2015-04-08T08:42:14Z 2019-12-06T22:26:43Z 2015-04-08T08:42:14Z 2019-12-06T22:26:43Z 2015 2015 Journal Article Narasimhan, V., Li, H., Miao, J. (2015). Micromachined high-g accelerometers : a review. Journal of micromechanics and microengineering, 25. https://hdl.handle.net/10356/107207 http://hdl.handle.net/10220/25338 10.1088/0960-1317/25/3/033001 184256 en Journal of micromechanics and microengineering © 2015 IOP Publishing Ltd. This is the author created version of a work that has been peer reviewed and accepted for publication by Journal of Micromechanics and Microengineering, IOP Publishing Ltd. It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: [http://dx.doi.org/10.1088/0960-1317/25/3/033001]. 31 p. application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
language	English
topic	DRNTU::Engineering::Mechanical engineering::Mechatronics
spellingShingle	DRNTU::Engineering::Mechanical engineering::Mechatronics Narasimhan, Vinayak Li, Holden Miao, Jianmin Micromachined high-g accelerometers : a review
description	This Topical Review reviews research and commercial development of high-g micromachined accelerometers. Emphasis is placed on different high-g sensing schemes and popular design templates used to achieve high-g sensing. Additionally, trends in high-g micromachined accelerometer development both in research and in the market are discussed.
author2	School of Mechanical and Aerospace Engineering
author_facet	School of Mechanical and Aerospace Engineering Narasimhan, Vinayak Li, Holden Miao, Jianmin
format	Article
author	Narasimhan, Vinayak Li, Holden Miao, Jianmin
author_sort	Narasimhan, Vinayak
title	Micromachined high-g accelerometers : a review
title_short	Micromachined high-g accelerometers : a review
title_full	Micromachined high-g accelerometers : a review
title_fullStr	Micromachined high-g accelerometers : a review
title_full_unstemmed	Micromachined high-g accelerometers : a review
title_sort	micromachined high-g accelerometers : a review
publishDate	2015
url	https://hdl.handle.net/10356/107207 http://hdl.handle.net/10220/25338
_version_	1759857959371800576

Micromachined high-g accelerometers : a review

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